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Abstract Talk
AT 048

Investigation of annealing conditions of Mg-implanted GaN by ultra-high-pressure annealing for further reduction of annealing pressure

Appointment

Date: 11/10/2022

Time: 09:15 – 09:30

Talk time: 12 Min.

Discussion time: 3 Min.

Location / Stream:

Salon Rome

Session

Ion implantation and annealing

Topics

Characterization
Electronic devices

Authors

Kensuke Sumida (Nagoya University / JP), Kazufumi Hirukawa (Nagoya University / JP), Dr. Hideki Sakurai (Nagoya University / JP), Dr. Kacper Sierakowski (Institute of High Pressure Physics Polish Academy of Sciences / PL), Prof. Dr. Masahiro Horita (Nagoya University / JP), Professor Michał Bockowski (Institute of High Pressure Physics Polish Academy of Sciences / PL; Nagoya University / JP), Professor Tetsu Kachi (Nagoya University / JP), Professor Jun Suda (Nagoya University / JP)