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  • Poster Presentation
  • PP 256

Sputtering epitaxy of transition metal nitrides and AlScN

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Authors

Christopher Lüttich (OvGU Magdeburg / DE), Florian Hörich (OvGU Magdeburg / DE), Ralf Borgmann (OvGU Magdeburg / DE), Jürgen Bläsing (OvGU Magdeburg / DE), Anja Dempewolf (OvGU Magdeburg / DE), Dr. Gordon Schmidt (OvGU Magdeburg / DE), Peter Veit (OvGU Magdeburg / DE), Professor Jürgen Christen (OvGU Magdeburg / DE), Professor André Strittmatter (OvGU Magdeburg / DE), Dr. Armin Dadgar (OvGU Magdeburg / DE)

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