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Poster Presentation
PP 160

Growth of GaN by tri-halide vapor phase epitaxy with GaCl3 gas synthesized by gallium metal and chlorine gas in external supply system

Appointment

Date: 11/10/2022

Time: 13:15 – 13:15

Talk time: 0 Min.

Discussion time: 0 Min.

Location / Stream:

Session

Topics

Characterization
Growth

Authors

Kazukuni Hara (Nagoya University / JP), Eizou Yamamoto (MIRISE Technologies Corporation / JP), Junji Ohara (MIRISE Technologies Corporation / JP), Masato Ishikawa (Gas-phase Growth Ltd. / JP), Dr. Jun Kojima (Nagoya University / JP), Dr. Shoichi Onda (Nagoya University / JP), Professor Jun Suda (Nagoya University / JP)