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IWN 2022
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Kazukuni Hara
Nagoya University / JP
Nagoya University
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11/10/2022
Poster Presentation
PP 160
Growth of GaN by tri-halide vapor phase epitaxy with GaCl3 gas synthesized by gallium metal and chlorine gas in external supply system
Characterization, Growth
Further involvements
11/10/2022
Poster Presentation
PP 160
Growth of GaN by tri-halide vapor phase epitaxy with GaCl3 gas synthesized by gallium metal and chlorine gas in external supply system
Characterization, Growth
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