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Abstract Talk
AT 156

ALE of AlGaN/GaN and ALD of GaN/AlN applying in-situ atomic layer real time monitor

Appointment

Date: 12/10/2022

Time: 15:30 – 15:45

Talk time: 12 Min.

Discussion time: 3 Min.

Location / Stream:

Salon London

Session

h-BN UV LED and quantum dots

Topic

Novel Materials and Nanostructures

Authors

Xuemei Wang (SENTECH Instruments GmbH / DE), Jakob Zessin (SENTECH Instruments GmbH / DE), Abid Ali (SENTECH Instruments GmbH / DE), Marcel Schulze (SENTECH Instruments GmbH / DE)