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IWN 2022
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DE
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Xuemei Wang
SENTECH Instruments GmbH / DE
SENTECH Instruments GmbH
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12/10/2022
15:30
–
15:45
12 Min.
3 Min.
Abstract Talk
AT 156
ALE of AlGaN/GaN and ALD of GaN/AlN applying in-situ atomic layer real time monitor
Novel Materials and Nanostructures
Further involvements
12/10/2022
15:30
–
15:45
12 Min.
3 Min.
Abstract Talk
AT 156
ALE of AlGaN/GaN and ALD of GaN/AlN applying in-situ atomic layer real time monitor
Novel Materials and Nanostructures
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