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Poster Presentation
PP 050

Improved crystal quality of the polarity selective epitaxial AlN measured by grazing incidence X-ray diffraction

Appointment

Date: 10/10/2022

Time: 17:30 – 17:30

Talk time: 0 Min.

Discussion time: 0 Min.

Location / Stream:

Topic Growth

Session

Growth

Topic

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Authors

Dr. Byeongchan So (Karlsruhe Institute of Technology (KIT) / DE), Dr. Sondes Bauer (Karlsruhe Institute of Technology (KIT) / DE), Dr. Uiho Choi (Tech University of Korea / KR), Minho Kim (Tech University of Korea / KR), Professor Okhyun Nam (Tech University of Korea / KR), Professor Tilo Baumbach (Karlsruhe Institute of Technology (KIT) / DE)