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  • Poster Presentation
  • PP 050

Improved crystal quality of the polarity selective epitaxial AlN measured by grazing incidence X-ray diffraction

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Mitwirkende

Dr. Byeongchan So (Karlsruhe Institute of Technology (KIT) / DE), Dr. Sondes Bauer (Karlsruhe Institute of Technology (KIT) / DE), Dr. Uiho Choi (Tech University of Korea / KR), Minho Kim (Tech University of Korea / KR), Professor Okhyun Nam (Tech University of Korea / KR), Professor Tilo Baumbach (Karlsruhe Institute of Technology (KIT) / DE)

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