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  • Abstract Talk
  • AT 147

Optimization of ALE process for GaN with the substitution of Ar by Kr

Termin

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Room Berlin

Session

Processes for Electronic Devices

Themen

  • Characterization
  • Optical devices

Mitwirkende

Dr. Cedric Mannequin (University of Tsukuba / JP), Professor Christophe Vallée (University of Tsukuba / JP; University of Grenoble-Alpes / FR), Dr. Gwénolé Jacopin (University of Grenoble-Alpes / FR), Dr. Christophe Durand (University of Grenoble-Alpes / FR), Professor Katsuhiro Akimoto (University of Tsukuba / JP), Dr. Takashi Teramoto (Air Liquide Laboratories / JP), Dr. Christian Dussarrat (Air Liquide Laboratories / JP), Professor Etienne Gheeraert (University of Grenoble-Alpes / FR; University of Tsukuba / JP), Professor Marceline Bonvalot (University of Tsukuba / JP; University of Grenoble-Alpes / FR), Dr. Henri Mariette (University of Grenoble-Alpes / FR; University of Tsukuba / JP)

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