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Dr. Dominik Jaeger

Evatec AG / CH

Evatec AG

Weitere Beteiligungen

10.10.2022
Poster Presentation
PP 064
Liquid target reactive magnetron sputtering of GaN on (AlN/)Al2O3
Characterization, Growth
10.10.2022
Poster Presentation
PP 060
Conductive GaN deposited by magnetron sputter deposition
Electronic devices, Growth
11.10.2022
09:30 – 09:45 12 Min. 3 Min.
Abstract Talk
AT 121
Formation and role of voids in the recovery of sputtered AlN during high temperature annealing
Characterization, Growth