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Abstract Talk
AT 254

Metal stop laser drilling for blind via holes of GaN-on-GaN devices

Appointment

Date: 14/10/2022

Time: 11:00 – 11:15

Talk time: 12 Min.

Discussion time: 3 Min.

Location / Stream:

Salon Rome

Session

Device processing technology

Topics

Characterization
Electronic devices

Authors

Professor Chiaki Sasaoka (Nagoya University / JP), Prof. Dr. Hiroshi Amano (Nagoya University / JP)