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Abstract Talk
AT 035

Impact of buffer layer on flatness and crystalline quality of N-polar AlN on sapphire substrate

Appointment

Date: 10/10/2022

Time: 16:15 – 16:30

Talk time: 12 Min.

Discussion time: 3 Min.

Location / Stream:

Salon Moskau

Session

AlN Growth

Topics

Electronic devices
Growth

Authors

Koki Hanasaku (Yamaguchi University / JP), Wataru Matsumura (Yamaguchi University / JP), Taketo Kowaki (Yamaguchi University / JP), Satoshi Kurai (Yamaguchi University / JP), Yongzhao Yao (Japan Fine Ceramics Center / JP), Yukari Ishikawa (Japan Fine Ceramics Center / JP), Prof. Dr. Narihito Okada (Yamaguchi University / JP), Professor Yoichi Yamada (Yamaguchi University / JP)