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Abstract Talk
AT 076

Laser slicing process for thinning GaN substrate and GaN on GaN devices

Appointment

Date: 11/10/2022

Time: 11:15 – 11:30

Talk time: 12 Min.

Discussion time: 3 Min.

Location / Stream:

Salon Moskau

Session

Vertical GaN Processing

Topics

Electronic devices
Growth

Authors

Professor Atsushi Tanaka (Nagoya University / JP), Ryuji Sugiura (Hamamatsu Photonics K.K. / JP), Daisuke Kawaguchi (Hamamatsu Photonics K.K. / JP), Toshiki Yui (Hamamatsu Photonics K.K. / JP), Yotaro Wani (Hamamatsu Photonics K.K. / JP), Tomomi Aratani (Hamamatsu Photonics K.K. / JP), Hirotaka Watanabe (Nagoya University / JP), Dr. Hadi Sena (Nagoya University / JP), Prof. Dr. Yoshio Honda (Nagoya University / JP), Yasunori Igasaki (Hamamatsu Photonics K.K. / JP), Professor Akio Wakejima (Nagoya Institute of Technology / JP), Professor Yuji Ando (Nagoya University / JP), Prof. Dr. Hiroshi Amano (Nagoya University / JP)