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Poster Presentation
PP 007

Thermal oxidation of [0001] GaN in water vapor compared with dry and wet oxidation – oxide properties and impact on GaN

Appointment

Date: 10/10/2022

Time: 17:30 – 17:30

Talk time: 0 Min.

Discussion time: 0 Min.

Location / Stream:

Topic Characterization

Session

Characterization

Topics

Characterization
Electronic devices

Authors

Dr. Łukasz Janicki (PORT Polish Center for Technology Development / PL), Ryszard Korbutowicz (Wrocław University of Science and Tech / PL), Mariusz Rudziński (Łukasiewicz Research Network - Institute of Microelectronics and Photonics / PL), Dr. Paweł P. Michałowski (Łukasiewicz Research Network - Institute of Microelectronics and Photonics / PL), Dr. Sebastian Złotnik (Military University of Technology / PL), Miłosz Grodzicki (Wrocław University of Science and Tech / PL), Dr. Sandeep Gorantla (PORT Polish Center for Technology Development / PL), Dr. Jarosław Serafińczuk (PORT Polish Center for Technology Development / PL), Professor Detlef Hommel (Institute of Low Temperature and Structure Research / PL), Professor Robert Kudrawiec (PORT Polish Center for Technology Development / PL)