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Poster Presentation
PP 007

Thermal oxidation of [0001] GaN in water vapor compared with dry and wet oxidation – oxide properties and impact on GaN

Termin

Datum: 10.10.2022

Zeit: 17:30 – 17:30

Redezeit: 0 Min.

Diskussionszeit: 0 Min.

Ort / Stream:

Topic Characterization

Session

Characterization

Themen

Characterization
Electronic devices

Mitwirkende

Dr. Łukasz Janicki (PORT Polish Center for Technology Development / PL), Ryszard Korbutowicz (Wrocław University of Science and Tech / PL), Mariusz Rudziński (Łukasiewicz Research Network - Institute of Microelectronics and Photonics / PL), Dr. Paweł P. Michałowski (Łukasiewicz Research Network - Institute of Microelectronics and Photonics / PL), Dr. Sebastian Złotnik (Military University of Technology / PL), Miłosz Grodzicki (Wrocław University of Science and Tech / PL), Dr. Sandeep Gorantla (PORT Polish Center for Technology Development / PL), Dr. Jarosław Serafińczuk (PORT Polish Center for Technology Development / PL), Professor Detlef Hommel (Institute of Low Temperature and Structure Research / PL), Professor Robert Kudrawiec (PORT Polish Center for Technology Development / PL)