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Abstract Talk
AT 244

In situ X-Ray scattering studies of the influence of plasma properties on epitaxial InN growth by plasma-enhanced atomic layer deposition

Appointment

Date: 14/10/2022

Time: 09:30 – 09:45

Talk time: 12 Min.

Discussion time: 3 Min.

Location / Stream:

Salon Moskau

Session

InGaN and Micro LEDs

Topics

Characterization
Growth

Authors