Luan Tiantian (Institute of microelectronics of the Chinese acadamy of sciences / CN), Jiang Qimeng (Institute of microelectronics of the Chinese acadamy of sciences / CN), Huang Sen (University of Chinese Academy of Sciences / CN), Wnag Xinhua (University of Chinese Academy of Sciences / CN), Guo Fuqiang (Institute of microelectronics of the Chinese acadamy of sciences / CN), Yao Yixu (University of Chinese Academy of Sciences / CN), Fan Jie (Institute of microelectronics of the Chinese acadamy of sciences / CN), Yin Haibo (Institute of microelectronics of the Chinese acadamy of sciences / CN), Jiang Haojie (Institute of microelectronics of the Chinese acadamy of sciences / CN), Wang Wenwu (Institute of microelectronics of the Chinese acadamy of sciences / CN), Liu Xinyu (Institute of microelectronics of the Chinese acadamy of sciences / CN)