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Poster Presentation
PP 066

Low-temperature PECVD process of wafer-scale boron nitride thin films

Termin

Datum: 10.10.2022

Zeit: 17:30 – 17:30

Redezeit: 0 Min.

Diskussionszeit: 0 Min.

Ort / Stream:

Topic Growth

Session

Growth

Themen

Growth
Novel Materials and Nanostructures

Mitwirkende

Professor Silvija Gradečak (National University of Singapore / SG), Dr. Soumyadeep Sinha (National University of Singapore / SG), Hippolyte Astier (Applied Materials- NUS Advanced Materials Corp Lab / SG), Muhammed Juvaid Mangattuchali (Applied Materials- NUS Advanced Materials Corp Lab / SG), Jing Yang Chung (National University of Singapore / SG), Chandan Das (Applied Materials Singapore Technology PTE LTD / SG), John Sudijono (Applied Materials Singapore Technology PTE LTD / SG)