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Poster Presentation
PP 117

Characterization of magnetron sputtered (Al,Sc)N layers by piezoelectric force microscopy (PFM)

Termin

Datum: 11.10.2022

Zeit: 13:15 – 13:15

Redezeit: 0 Min.

Diskussionszeit: 0 Min.

Ort / Stream:

Topic Characterization

Session

Characterization

Themen

Characterization
Growth

Mitwirkende

Dr. Thomas Modes (Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP / DE), Dr. Olaf Zywitzki (Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP / DE), Dr. Stephan Barth (Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP / DE), Dr. Hagen Bartzsch (Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP / DE)