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Balasubramanian Sundarapandian

Fraunhofer Institute for Applied Solid State Physics / DE

Fraunhofer Institute for Applied Solid State Physics

Vortrag

10.10.2022
Poster Presentation
PP 049
High quality in-Plane oriented AlN(0001)/Si(111) seed layers for Al_0.7Sc_0.3N(0001) thin films prepared by magnetron sputter epitaxy in N₂ + NH₃ gas mixture
Electronic devices, Growth

Weitere Beteiligungen

10.10.2022
Poster Presentation
PP 049
High quality in-Plane oriented AlN(0001)/Si(111) seed layers for Al_0.7Sc_0.3N(0001) thin films prepared by magnetron sputter epitaxy in N₂ + NH₃ gas mixture
Electronic devices, Growth