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Dr. Jana Ligl

Evatec AG / CH

Evatec AG

Vortrag

12.10.2022
Poster Presentation
PP 350
Highly crystalline AlN by physical vapor deposition with NH3 sputtering gas as potential seed layer for power electronic device applications
Characterization, Growth

Weitere Beteiligungen

12.10.2022
Poster Presentation
PP 350
Highly crystalline AlN by physical vapor deposition with NH3 sputtering gas as potential seed layer for power electronic device applications
Characterization, Growth