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Shonosuke Kimura

Tokyo Institute of Technology / JP

Tokyo Institute of Technology

Vortrag

11.10.2022
17:15 – 17:30 12 Min. 3 Min.
Abstract Talk
AT 098
Performance improvements of P-channel GaN HFETs by atomic layer etching using nitrogen plasma
Electronic devices, Novel Materials and Nanostructures

Weitere Beteiligungen

11.10.2022
17:15 – 17:30 12 Min. 3 Min.
Abstract Talk
AT 098
Performance improvements of P-channel GaN HFETs by atomic layer etching using nitrogen plasma
Electronic devices, Novel Materials and Nanostructures