Microscopy Conference 2023

Crystals and grains – EBSD in 2+ dimensions

IM 3: SEM and FIB developments

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This session dial with new developments in SEM and FIB technology and methods. Especially new detector principals and designs for electrons, ions and photons locally emitted after interaction with different types of ion or electron beams. Techniques using the angular distribution of the scattered ions and electrons like EBSD and ECCI will be covered by the contributions. New strategies in beam control and data analysis will also be discussed.

Karsten Kunze

Engagements

28/02/2023