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Poster Presentation
PP 167

Internal stress and polarity control of GaN film by low impurity GaN target

Appointment

Date: 11/10/2022

Time: 13:15 – 13:15

Talk time: 0 Min.

Discussion time: 0 Min.

Location / Stream:

Topic Growth

Session

Growth

Topics

Characterization
Growth

Authors

Yuya Suemoto (Tosoh Corporation / JP), Dr. Yoshihiro Ueoka (Tosoh Corporation / JP), Masami Mesuda (Tosoh Corporation / JP), Liwen Sang (National Institute for Materials Science / JP), Takahiro Nagata (National Institute for Materials Science / JP), Toyohiro Chikyow (National Institute for Materials Science / JP)