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  • Poster Presentation
  • PP 354

Study on the thermal stability of sputtered metallic TiN thin films used for self-assembly of AlN nanowires at 1200 °C

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Topic Growth

Session

Growth

Topics

  • Characterization
  • Growth

Authors

Dr. Philipp John (PDI-Berlin / DE), Dr. Thomas Auzelle (PDI-Berlin / DE), Dr. Jonas Lähnemann (PDI-Berlin / DE), Dr. Oliver Brandt (PDI-Berlin / DE), Dr. Manfred Ramsteiner (PDI-Berlin / DE), Dr. Lutz Geelhaar (PDI-Berlin / DE)

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