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Poster Presentation
PP 382

Chemical mapping with sub-10nm resolution – bulk and e-transparent specimens of FinFET and LED devices investigated with SEM EDS

Appointment

Date: 12/10/2022

Time: 12:00 – 12:00

Talk time: 0 Min.

Discussion time: 0 Min.

Location / Stream:

Topic Novel Materials and Nanostructures

Session

Novel Materials and Nanostructures

Topics

Characterization
Novel Materials and Nanostructures

Authors

Purvesh Soni (Bruker / DE), Dr. Anna Mogilatenko (Ferdinand-Braun-Institut / DE), Meiken Falke (Bruker / DE)