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IWN 2022
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Invited Talk
IT 17
Fabrication of high-quality AlN templates by Face-to-face annealing of sputter-deposited films
Invited Speaker
Professor Hideto Miyake
Mie University / JP
Appointment
Date:
11/10/2022
Time:
09:00
–
09:30
Talk time:
25 Min.
Discussion time:
5 Min.
Location / Stream:
Salon Moskau
Session
AlN HT annealing
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