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  • Poster Presentation
  • PP 347

Applying line-of-sight quadrupole mass spectrometry to monitor in situ changes in In incorporation during epitaxy of thick (In,Ga)N films

Appointment

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Topic Electronic devices

Session

Electronic devices

Topics

  • Characterization
  • Growth

Authors

Jingxuan Kang (Paul-Drude-Institute / DE), Dr. Thomas Auzelle (Paul-Drude-Institute / DE), Mikel Gómez Ruiz (Paul-Drude-Institute / DE), Aidan Campbell (Paul-Drude-Institute / DE), Dr. Philipp John (Paul-Drude-Institute / DE), Dr. Duc Van Dinh (Paul-Drude-Institute / DE), Dr. Jonas Lähnemann (Paul-Drude-Institute / DE), Dr. Oliver Brandt (Paul-Drude-Institute / DE), Dr. Lutz Geelhaar (Paul-Drude-Institute / DE)

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