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Abstract Talk
AT 124

MOCVD-grown AlScN for MEMS-based acoustic filter applications

Appointment

Date: 12/10/2022

Time: 09:15 – 09:30

Talk time: 12 Min.

Discussion time: 3 Min.

Location / Stream:

Session

Sc/B containing III-nitrides

Topics

Electronic devices
Growth

Authors

Dr. Craig Moe (Akoustis / US), Dr. Jeff Leathersich (Akoustis / US), Frank Bi (Akoustis / US), Kamran Cheema (Akoustis / US), Mary Winters (Akoustis / US), Jeffery Shealy (Akoustis / US)