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IWN 2022
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Mario Prescher
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Further involvements
10/10/2022
Poster Presentation
PP 049
High quality in-Plane oriented AlN(0001)/Si(111) seed layers for Al
0.7
Sc
0.3
N(0001) thin films prepared by magnetron sputter epitaxy in N
2
+ NH
3
gas mixture
Electronic devices, Growth
12/10/2022
11:00
–
11:15
12 Min.
3 Min.
Abstract Talk
AT 131
MOCVD growth and simulation of AlScN high-electron-mobility-transistor-structures
Characterization, Novel Materials and Nanostructures
v1.20.0
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