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IWN 2022
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Purvesh Soni
Bruker / DE
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12/10/2022
Poster Presentation
PP 382
Chemical mapping with sub-10nm resolution – bulk and e-transparent specimens of FinFET and LED devices investigated with SEM EDS
Characterization, Novel Materials and Nanostructures
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12/10/2022
Poster Presentation
PP 382
Chemical mapping with sub-10nm resolution – bulk and e-transparent specimens of FinFET and LED devices investigated with SEM EDS
Characterization, Novel Materials and Nanostructures
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