Microscopy Conference 2023

Faster mm-scale defect/failure analysis by combining plasma FIB milling and laser ablation

Workshop 2: Tricks and pitfalls for FIB sample preparation in materials and life sciences

Focused ion beam (FIB) technique combined with scanning electron microscopy (SEM) enabling nm-precise sample preparation for a broad range of applications in semiconductor industry, material- and life science.  One major application is the preparation of cross sectional and planar samples for electron microscopy analysis. Recent developments of inducted plasma ion sources and combined laser ablation provide increased throughput over conventional Ga-FIB for large area milling.   
 In life sciences, the use of combined  FIB / SEM systems opened new applications for researchers to analyse cellular and multi-cellular systems by slice and view volume imaging and to produce thin cellular lamellae suitable for high-resolution in situ transmission electron tomography. The further development of correlative light and electron microscopy approaches are now opening new avenues for the precise targeting and imaging of unperturbed native environments.
This session welcomes contributions from recent advances in sample preparation and the development and implementation of new hardware and software solutions for FIB milling approaches in material and life sciences, including automated lamella preparation, volume imaging, correlative workflows, and lift out approaches both at room and cryogenic temperature.


Petr Klímek

Vortrag

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