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  • Abstract Talk
  • AT 226

Lattice-polarity and microstructures in AlN films grown on c-Al2O3 (0001) sapphire substrates by NH3-free high temperature MOCVD

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Room Berlin

Session

Structural Characterization, Growth model-2

Themen

  • Characterization
  • Growth

Mitwirkende

Dr. Xuqiang Shen (National Institute of Advanced Industrial Science and Technology (AIST) / JP), Dr. H. Matsuhata (National Institute of Advanced Industrial Science and Technology (AIST) / JP), Kazunobu Kojima (National Institute of Advanced Industrial Science and Technology (AIST) / JP)

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