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  • Invited talk
  • WS2.001-invited

Mesoscale sample preparation by multi-Ion-species-plasma-FIB

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titanium

Session

Tricks and pitfalls for FIB sample preparation in materials and life sciences

Topic

  • Workshop 2: Tricks and pitfalls for FIB sample preparation in materials and life sciences

Authors

Joakim Reuteler (Zurich / CH)

Abstract

Abstract text (incl. figure legends and references)
Sample preparation for synchrotron X-ray tomography and spectroscopy experiments often requires a target sample size on the order of several tens to hundreds of micrometers. Focused Ion Beam (FIB) based techniques are the most versatile solution: Delicate or brittle materials that are hard to machine mechanically can be dealt with and site-specific preparation is straight forward. Generally Ga-FIB tools can be employed, however, the milling times may be quite long. Here Plasma-FIB instruments offering up to few microamperes of ion current can offer time savings, but also enable to reach dimensions that are simply not manageable by Ga-FIB. In this talk several sample preparation tasks and their solution will be discussed. The materials range from rock to 3D printed alumina over to embedded polymer electrolyte fuel cells and solid state lithium ion batteries. Different sample geometries (windows, pillars and thick lamellae) are covered, challenges and solutions for in-situ lift-out and mounting are discussed. Fig. 1. SEM image of 4 uA Ar-PFIB window with an artificial "crack" milled into 3D printed alumina. Sample courtesy of Fabrizio Verga, Inspire /Wegener group, ETH Zürich.

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