Abstract text (incl. figure legends and references)

Reduced-dimensionality materials are increasingly gathering pace and progress in many important fields of life. For instance, they are undergoing rapid development in energy conversion, solid-state lighting, biological sensing, and information technology.

Investigating such nanoscale featured materials became a necessity to achieve better properties and performances. Electron-microscopy chemical mapping is one of the powerful tools to do so. For bulk samples, though, it is very challenging to combine high spatial resolution imaging and spectroscopic analysis at the nanoscale.

In response to this challenge, Bruker launched recently the XFlash® 7 EDS detectors. These new detectors offer high spatial resolution by providing excellent output count rates at low probe currents. This ideal combination is obtained thanks to the best solid angle and highest pulse processing speeds ensuring high sensitivity and the highest collection efficiency.

In the present work, sub-10 nm EDS-spatial resolution is achieved using low and high kVs and are demonstrated through examples of bulk semiconductor and aerospace materials with challenging element combinations.