Microscopy Conference 2023

Hyperspectral visualization of picometric motion

IM 3: SEM and FIB developments

This session dial with new developments in SEM and FIB technology and methods. Especially new detector principals and designs for electrons, ions and photons locally emitted after interaction with different types of ion or electron beams. Techniques using the angular distribution of the scattered ions and electrons like EBSD and ECCI will be covered by the contributions. New strategies in beam control and data analysis will also be discussed.

SEM and FIB developments

Kevin MacDonald

Engagements

28/02/2023