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Dr. Thomas Tschirky

Evatec AG / CH

Evatec AG

Speaker

10/10/2022
Poster Presentation
PP 064
Liquid target reactive magnetron sputtering of GaN on (AlN/)Al2O3
Characterization, Growth

Further involvements

10/10/2022
Poster Presentation
PP 064
Liquid target reactive magnetron sputtering of GaN on (AlN/)Al2O3
Characterization, Growth
10/10/2022
Poster Presentation
PP 060
Conductive GaN deposited by magnetron sputter deposition
Electronic devices, Growth